| 摘要 |
PURPOSE:To provide a miniature, dust-free and lubrication-free actuator having high positioning accuracy. CONSTITUTION:A thrust magnetic bearing is integrated with a step motor and combined with a radial magnetic bearing thus supporting a rotary shaft with no contact and performing positioning in the rotary direction. A driving section 7 constituted of a step motor/thrust magnetic bearing is disposed in the center and radial bearings 8, 9 are disposed on the opposite sides in the direction of the thrust shaft. Furthermore, displacement sensors 10, 11, 12, 12 for detecting gaps in the directions of radial shaft and the thrust shaft are provided. Rotor A, i.e., a rotary shafy 6, is supported by the magnetic bearing 8, 9 with no contact therewith and positioning in the rotary direction is carried out by means of a step motor at the driving section 7. |
