| 摘要 |
PURPOSE:To provide a new secondary ion analyzer capable of preventing charge-up in the case of analyzing positive secondary ions. CONSTITUTION:In the case of analyzing positive secondary ions in a sample having insulating property, switches 16 and 17 are charged over respectively, and (+5KV) is impressed upon a sample support stand 3 from the second power supply 4B, so as to make a sample 2 to hold positive electric potential. Voltage (+5KV) generated by (-5KV) from the third power supply 14 and (+10KV) from the fourth power supply 15 is impressed upon the cathode 11 of an electron gun, and (+10KV) from the above- mentioned fourth power supply 15 is impressed upon an anode 12. By heating the cathode 11 by means of a heating power supply 13, electrons are generated from the cathode. As for said electrons, since (+5KV) is impressed upon the cathode and (+10KV) is impressed upon the anode 12 respectively, the electrons can obtain kinetic energy of 5KeVK, and can proceed in the sample surface direction. Since the positive potential (+5KV) is held by the sample 2, the electrons are decelerated by means of the stopping electric potential between said anode 12 and the sample 2, and can reach the vicinity of the sample surface at approximately OV, and can form electron cloud in the vicinity of said sample surface. When the sample surface is charged up, the electrons corresponding to the charge-up degree can be supplied to the sample surface. |
