| 摘要 |
<p>PURPOSE:To obtain a holding jig which can suck each chip in vacuum, prevent damage of a chip due to static electricity, minimize runaround of cleanser at a side for sucking in vacuum at the time of cleaning the chip, and hold a position of the chip even after the vacuum sucking is, after the chip is cleaned, released. CONSTITUTION:A chip holding jig is formed of a porous material 6, which has conductivity and is formed smaller than a chip size. Protrusions 7a each of which is narrower than an interval between chips, are provided, and a wider part than the interval between the chips including the protrusions is formed of a nonporous material 7.</p> |
