| 摘要 |
PURPOSE:To improve the reflectivity and durability by forming a metallic thin film which has higher reflectivity than material metal on the specular surface of the material metal and forming a diamond carbon film thereupon. CONSTITUTION:The material 1 of the metallic rotary polygon mirror is aluminum which has high reflectivity itself and its surface is made into the specular surface by diamond grinding. After this mirror surface is cleaned, a chromium thin film 2 and a copper thin film 3 are formed by vacuum deposition. Then an Al2O3 thin film 4 is formed to optical film thickness lambda0/4 (lambda0: wavelength of semiconductor laser used as light source). A microwave electron cyclotron resonance plasma CVD device is used to form the diamond carbon film 5 to the same thickness. Consequently, desired and high reflectivity are obtained as optical characteristics and chemical stability of solvent resistance, moisture resistance, etc., is superior. |
