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经营范围
发明名称
METHOD AND DEVICE FOR PLASMA TREATMENT USING MICROWAVE
摘要
申请公布号
JPH04264722(A)
申请公布日期
1992.09.21
申请号
JP19910025985
申请日期
1991.02.20
申请人
HITACHI LTD
发明人
SUZUKI YASUMICHI;SAITO YUTAKA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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