SEMICONDUCTOR PRODUCING DEVICE,申请号JP19910024595-传众专利搜索

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发明名称	SEMICONDUCTOR PRODUCING DEVICE
摘要
申请公布号	JPH04263065(A)	申请公布日期	1992.09.18
申请号	JP19910024595	申请日期	1991.02.19
申请人	FUJITSU LTD	发明人	SUEHIRO HARUHIKO
分类号	C23C14/14;C23C14/24;H01L21/285	主分类号	C23C14/14
代理机构		代理人
主权项
地址

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