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发明名称
EXPLOSION-PROOF MECHANISM OF PARTICULATE DETECTOR FOR REACTION GAS
摘要
申请公布号
JPH04263420(A)
申请公布日期
1992.09.18
申请号
JP19910045765
申请日期
1991.02.18
申请人
HITACHI ELECTRON ENG CO LTD;NIPPON SANSO KK
发明人
YAMAMOTO HOZUMI;SHINPO SENJI;IKEDA TAKUYA;TAKAHASHI SADASHI;TOMIMOTO AKIO
分类号
H01L21/205;H01L21/285;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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