| 摘要 |
<p>A surface layer thickness measuring apparatus lower in price with the use of a light ray measuring system only. The correct surface layer thickness may be measured, independently of the variation in the temperature of the measured, in the external light rays, in the radiation energy of the reference light ray source, in the chopper temperature, the influences by the temperature in the surface layer thickness measuring apparatus, through the mode combination by the driving operation of the opening and closing device and the total reflection mirror.</p> |
