| 摘要 |
PURPOSE:To obtain a composite ceramic film bakable at a low temperature in a short time, having small texture size and exhibiting electrical resistance sensitive to the temperature and atmospheric pressure by dispersing ultrafine particles of metal or metal oxide in a polymer layer and firing the obtained composite material in an inert gas. CONSTITUTION:A thermodynamically non-equilibrium polymer layer 2 is deposited on a substrate 1 in solidified state by a vacuum evaporation process comprising the heating of a high molecular material in vacuum to effect the melting and evaporation of the polymer or by a melting and quenching process comprising the melting of a polymeric material above its melting point and the immediate quenching of the molten polymer with liquid nitrogen, etc. A metal layer 3 is laminated on the polymer surface e.g. by evaporation of a metal or lamination of a metal foil or plate. When the layer 2 is transferred to the equilibrated state by heating or leaving the composite material, the metal in the layer 3 is diffused into the layer 2 in the form of fine particles 4 of the metal or metal oxide having particle size of <=100nm until the layer 3 is eliminated. The obtained polymeric composite material 5 is fired in a gas (e.g. N2) to obtain a composite film at least containing the compound of MCx and MOy (M is transition metal such as Cu and Ni, group IIB element such as Zn or group IVB element such as Si; x is 0.01-1,000; y is 0.2-5). |
