MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE,申请号EP19920102522-传众专利搜索

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发明名称	MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE
摘要
申请公布号	EP0499985(A3)	申请公布日期	1992.09.16
申请号	EP19920102522	申请日期	1992.02.14
申请人	KABUSHIKI KAISHA TOSHIBA;TOSHIBA MICRO-ELECTRONICS CORPORATION	发明人	SAEKI, YUKIHIRO;MATSUMOTO, OSAMU;YOSHIDA, MASAYUKI;MIZUTANI, TAKAHIDE;CHIDA, NOBUYOSHI;SHIGEMATSU, TOMOHISA;UEMURA, TERUO;TOYODA, KENJI;TAKAMURA, HIROYUKI
分类号	H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/336;H01L21/82	主分类号	H01L21/8247
代理机构		代理人
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