| 摘要 |
PURPOSE:To improve productivity by providing a path, in which a reactive gas passes through a negative electrode giving high frequency or the electric energy of DCs from a gas introducing port, passed through a positive electrode and reaches an exhaust port, and installing reaction vessels while mutually connecting them. CONSTITUTION:The reactive gas is introduced selectively into cylindrical spaces standing close together in a cylindrical space in which a substrate is arranged, and mainly plasma-discharged selectively in the regions. For prevent the generation of a large number of flakes on the introducing port side for the reactive gas, an electrode set up on the introducing port side for the reactive gas in a reticulate or porous shape is used as the negative electrode, and the positive electrode is fitted on the exhaust port side. When the inner diameter of the introducing port 18 for the reactive gas and the negative electrode 67 have approximately the same size, and the inner diameter of the exhaust port 21 and the positive electrode 68 have approximately the same size and high-frequency discharge is executed, the gas flows along the cylindrical spaces, the surfaces to which the reactive gas is formed, and the spaces are plasma-discharged preferentially. |
