| 摘要 |
PURPOSE:To increase secondary electron detection efficiency and measure specimen voltage with high precision. CONSTITUTION:An air gap part 29 which penetrates the part between a coil winding part 27 and the vicinity of the outlet of an energy analyzer 9 and has rotation symmetry having an optical axis 3 as the center is installed in magnetic substance 19 of an objective 7, and a magnetic lens 24 is formed in the vicinity of the outlet of the energy analyzer 9 by using leakage magnetic field 30 generated between a magnetic substance optical axis side part 19A in the upper part of the air gap part 29 and a magnetic substance optical axis side part 19B in the lower part. |
