| 摘要 |
<p>PURPOSE:To produce highly pure gas efficiently by feeding a gas mixture through an inlet of an adsorption column loaded with adsorbents for selectively adsorbing target gas, causing the target gas to be adsorbed on the adsorbents, discharging unadsorbed gas in the column by means of target gas stored beforehand, and then taking out the target gas in the column. CONSTITUTION:In a step A, a gas mixture is fed through an inlet port into an adsorption column 2 loaded with adsorbents 5 for selectively adsorbing taget gas to cause the target gas to be adsorbed on the adsorbents. In a following step B, during the step A or thereafter, unadsorbed gas is discharged from an outlet port opposite to the inlet port of the column 2. In a following step C, after completion of the step A or the step B, gas identical to the target gas which has been produced and stored in a reservoir 4 is fed through the inlet port into the column 2 to purge unadsorbed gas through the outlet port. After completion of the step C, the target gas in the column 2 is taken out from the inlet port of the column 2.</p> |
