| 摘要 |
<p>PURPOSE:To obtain a micro-flow sensor which is less in power consumption, high in sensitivity, and smoothly driven with a pulse by forming at least either an exothermic resistor or temperature measuring resistor of a laminated resistor composed of a plurality of layers and increasing the resistance value of the laminated resistor. CONSTITUTION:A temperature measuring resistor is composed of a lower and upper layers 11 and 12 and an exothermic resistor is composed of a lower and upper layers 21 and 22. The lower layer resistors 11 and 21 are respectively connected with the upper layer resistors 12 and 22 through coupling sections 8 and the resistors 11 and 21 are insulated from the resistors 12 and 22 with an intermediate dielectric layer 9. As a result, the power consumption of the exothermic resistor can be reduced by increasing the resistance value of the exothermic resistor and the magnitude of a bridge output signal can be made larger by increasing the resistance of the temperature measuring resistor. In addition, a decline in the responding speed at the time of driving the micro-flow sensor with a pulse can be prevented by reducing the interline mutual inductance when the strip resistors of one layer are put on the top, bottom, and middle of the strip resistors of the adjacent layer.</p> |
