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发明名称
METHOD AND DEVICE FOR OUTPUTTING INSPECTION RESULT
摘要
申请公布号
JPH04258719(A)
申请公布日期
1992.09.14
申请号
JP19910020010
申请日期
1991.02.13
申请人
HITACHI LTD;HITACHI COMPUTER ELECTRON CO LTD
发明人
MATSUKAWA KIYONAGA;MIO SHIGEMI;IJICHI HIROAKI
分类号
G01D9/00;H01L21/66
主分类号
G01D9/00
代理机构
代理人
主权项
地址
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