发明名称 GAALAS EPITAXIAL WAFER FOR LIGHT-EMITTING DIODE AND MANUFACTURE THEREOF
摘要 PURPOSE:To provide a GaAlAs wafer for a p-n junction light-emitting diode, capable of emission at a p-type epitaxial GaAlAs layer with an n-type GaAs substrate remaining unremoved, while having good crystallinity at the p-n junction for improved emission efficiency. CONSTITUTION:An n-type GaAs substrate 1 is doped with silicon, acting as both acceptor and donor, so that an n-type GaAlAs substrate 1 and a p-type GaAlAs substrate 2 are formed to provide a p-n junction on the substrate. The growth rate of the p-epitaxial GaAlAs layer 3 is controlled so that the band gap energy at the layer 3 may become greater than the photon energy derived from emission of light at the forward-biased p-n junction. The temperature at which n-type GaAlAs changes to p-type GaAlAs is selected to be at 890 deg.C.
申请公布号 JPH04259261(A) 申请公布日期 1992.09.14
申请号 JP19910041106 申请日期 1991.02.13
申请人 HITACHI CABLE LTD 发明人 NOGUCHI MASAHIRO
分类号 H01L21/208;H01L33/30 主分类号 H01L21/208
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