MANUFACTURE OF ACTIVE MATRIX SUBSTRATE

摘要

PURPOSE:To prevent a pixel electrode from peeling by surface-treating an organic transparent insulating film in the atmosphere of inert gas which is made plasma. CONSTITUTION:Thin film transistors 30 are arranged on a substrate 1 in matrix to form a thin film transistor array. Contact holes 12 are made by applying a transparent insulating film 10 to the surface of the array and patterning. The precision of the surface is improved by surface-treating the transparent insulating film 10 in the atmosphere of inert gas made plasma. After that, pixel electrodes 11 are obtained by forming a conductive film on the surface of the transparent insulating film 10 and patterning. Thereby adhesive strength between the transparent insulating film 10 and the pixel electrode 11 is increased.