| 摘要 |
Apparatus with a multi-axis mechanism to perform, say, measurements or tests, has at least one pair of temperature detectors individually for each of selected members of the mechanism, each pair of temperature detectors being arranged to sense temperature differences transversely across the associated member. The required positions of the temperature detectors are predetermined from a preliminary examination of the mechanism, so that the extent and direction of each predetermined aspect of thermal distortion within the mechanism, can be computed from simultaneously detected transverse temperature differences, employing algorithms devised as a result of the preliminary examination of the mechanism. Compensation for corresponding selected errors in the measurements or tests can be calculated from the computed extent and direction of each of the predetermined aspects of thermal distortion within the mechanism. |
