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发明名称
FORMING METHOD FOR INSULATING FILM
摘要
申请公布号
JPH04257225(A)
申请公布日期
1992.09.11
申请号
JP19910018177
申请日期
1991.02.12
申请人
OKI ELECTRIC IND CO LTD
发明人
FUKUDA HISASHI
分类号
H01L21/205;H01L21/316;H01L29/78
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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