发明名称 SUPER SMOOTH POLISHING METHOD
摘要 PURPOSE:To polish a work piece in a super smoothness, by removing ripples generating on the work piece with good efficiency. CONSTITUTION:There is a ripple whose height is (h) and whose cycle is P on the face to be worked of a work piece 3. A polishing tool 1 having a diameter D which is more than two times the ripple cycle P is arranged in opposition to the face to be worked, a pitch 2 closedly fitted to a polishing tool 1 is interposed between the polishing tool 1 and work piece 3. In polishing the work piece 3, it is polished by rocking the polishing tool 1 at more than a mean rocking speed at 1mm each second, with the rocking width in >=1/2 of the cycle of ripple in the arrow mark A direction shown in the figure, while pressing the polishing tool 1 to the work piece 3.
申请公布号 JPH04256562(A) 申请公布日期 1992.09.11
申请号 JP19910031357 申请日期 1991.02.01
申请人 CANON INC 发明人 ANDO MANABU
分类号 B24B13/00;B24B37/00 主分类号 B24B13/00
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