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发明名称
POLYMER DEPOSITION CONTROLLING METHOD FOR DRY ETCHER
摘要
申请公布号
JPH04255217(A)
申请公布日期
1992.09.10
申请号
JP19910038149
申请日期
1991.02.07
申请人
YAMAHA CORP
发明人
TAWARA TAKASHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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