| 摘要 |
PURPOSE:To increase residual magnetic flux density, to sufficiently increase coercive force and to decrease Curie temperature. CONSTITUTION:A substrate 21 is placed in the atmosphere of mixed gas containing at least oxygen and high frequency power sources 26, 27 are connected between the substrate 21 and each of targets 24, 25 to treat the substrate by sputtering. Thereby an oxygen-Co/Pt artificial grid film 10 is formed on the substrate 21. The film is represented by the composition formula, (Co/ Pt)100-XOX, when X is atom% and the composition is set in the range of 1<=X<=30. Setting is made so that Co layer thickness, dCo, may be 1Angstrom <=dCo<=15Angstrom and Pt layer thickness, dPt, may be 2Angstrom <=dPt<=30Angstrom . Therefore, not only higher residual magnetic flux density in magnetic recording for perpendicular recording but also larger coercive force and lower Curie temperature in thermomagnetic recording can be obtained. |
