| 摘要 |
PURPOSE:To prevent the irregularity of a wire bonding by freely altering the magnitude of a colliding load. CONSTITUTION:When a capillary is abruptly dropped from a position 1, it is controlled from a position 2 several hundreds microns above a position to be predicted for collision to a die surface at an equal speed. The slope of a line to a horizontal plane indicates the speed of a capillary 23 to indicate that, the more sharp the slope is, the higher the speed is. When the capillary collides with the die surface, i.e., when the capillary is moved to a position 3, the equal speed control is altered. Thus, the collision to the die surface is detected from the variation of the speed, and a load P necessary to form eutectic crystal in a sphere of gold wire on the die surface is applied. Then, the capillary is fed through positions 4, 5 to a position 6, and leads 22 are controlled at the speed and pressurized. Thus, when the equal speed control is achieved between the positions 2 and 3 and a mechanical contact is detected at the position 3, a CPU immediately produces a signal for applying a load to mechanically pressurize the load. |
