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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04255215(A)
申请公布日期
1992.09.10
申请号
JP19910016230
申请日期
1991.02.07
申请人
NEC CORP
发明人
OZAKI JUN
分类号
H01L21/28;H01L21/302;H01L21/3065
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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