| 摘要 |
PURPOSE:To improve oxidation resistance by a method wherein, after Ti is evaporated on the surface of a specified rare earth sintered magnet body, and nitogen ions are simultaneously implanted, heat treatment is performed. CONSTITUTION:On the surface of an R-Fe-B based rare earth magnet body (R is a combination of one or more kinds of rare earth elements containing Y), Ti is evaporated, and N ions are simultaneously implanted. Then heat treatment is performed at 100-200 deg.C. By simultaneously performing the evaporation of Ti and the implantaion of N ions in this manner, a mixed layer of R-Fe-B, Ti and N is formed on the interface between the magnet body and the Ti deposited film, and N ions mix in the whole part of the Ti evaporation film. As the result, the mixed layer is turned into a mixed layer of R-Fe-B and TiN, and the Ti evaporation film is turned into a TiN film. Thereby oxidation resistance is improved. |
