| 摘要 |
PURPOSE:To provide means for solving optical deterioration of an amorphous solar cell which employs an amorphous semiconductor element and particularly amorphous silicon series as a main material. CONSTITUTION:In order to form a film which contains 1016 pieces/cm<3> or more of at least one type of rare earth element gas atoms (Rn, Xe, Kr, Ar, Ne, He) so as to reduce optical deterioration in an amorphous silicon allay film, the film may be formed of inert gas such as Xe, Kr, Ar, Ne, He, etc., as dilute gas for SiH4 gas. Heretofore, optical deterioration of an amorphous solar cell can be remarkably reduced without impairing initial characteristics, which has been very difficult so far. |
