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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH04252024(A)
申请公布日期
1992.09.08
申请号
JP19910008272
申请日期
1991.01.28
申请人
NEC YAMAGATA LTD
发明人
OKUYAMA SATORU
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
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