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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04251933(A)
申请公布日期
1992.09.08
申请号
JP19910001305
申请日期
1991.01.10
申请人
FUJITSU LTD
发明人
KANBARA KAZUHIRO
分类号
H01L21/316;H01L29/78
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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