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发明名称
MULTICHAMBER PROCESS APPARATUS
摘要
申请公布号
JPH04251921(A)
申请公布日期
1992.09.08
申请号
JP19910001316
申请日期
1991.01.10
申请人
SONY CORP
发明人
SATO JUNICHI;HASEGAWA TOSHIAKI
分类号
H01L21/205;H01L21/285;H01L21/302;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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