发明名称 |
Process for coating a substrate with silica |
摘要 |
To form a coating of silica on a substrate, the substrate is coated with a silica precursor having a melting point between about 50 DEG and about 450 DEG C. The coating is heated to a temperature above its melting point in an inert environment to allow the coating to melt and flow. The melted coating is then heated in an environment which facilitates conversion to silica for a time sufficient to convert it to silica.
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申请公布号 |
US5145723(A) |
申请公布日期 |
1992.09.08 |
申请号 |
US19910710627 |
申请日期 |
1991.06.05 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
BALLANCE, DAVID S.;CAMILLETTI, ROBERT C.;GENTLE, THERESA E. |
分类号 |
B05D3/02;B05D7/24;C04B41/50;C23C18/12;H01L21/312;H01L21/316 |
主分类号 |
B05D3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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