EVACUATION SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS,申请号JP19910001370-传众专利搜索

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发明名称	EVACUATION SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号	JPH04252021(A)	申请公布日期	1992.09.08
申请号	JP19910001370	申请日期	1991.01.10
申请人	NEC KYUSHU LTD	发明人	OTSUKA YOJI
分类号	C23C14/24;H01L21/205;H01L21/31	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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