| 摘要 |
PURPOSE:To provide the ionizing radiation sensitive resin composition capable of maintaining high heat resistance and wide development latitude without lowering high resolution and high sensitivity. CONSTITUTION:The ionizing radiation sensitive resin composition contains an alkali-soluble resin and an ionizing radiation sensitive resin, and further at least one kind of compound represented by formula I and/or formula II in an amount of 2-50wt.% of the alkali-soluble resin. |
