发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To increase the storage capacitance of a semiconductor device having a static capacitor as well as to improve the yield of the device. CONSTITUTION:A semiconductor device is constituted comprising a capacitor Q constituted of a storage electrode 4 formed by providing extendedly conductive fins 4b toward the internal direction and the external direction from the peripheral walls of a bottomed cylinder-shaped conductive film 4a provided on a semiconductor layer (a silicon substrate) 2, a storage electrode 28 formed by extending outside the conductive fins toward the internal direction and the external direction from both sidewalls of the conductive film of a U-shaped section provided on the layer 2 or counter electrode 42 formed into a lattice type section on the layer 2.
申请公布号 JPH04252068(A) 申请公布日期 1992.09.08
申请号 JP19910001653 申请日期 1991.01.10
申请人 FUJITSU LTD;KIYUUSHIYUU FUJITSUU EREKUTORONIKUSU:KK 发明人 TAZUME HISAO
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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