| 摘要 |
PURPOSE:To improve the detecting sensitivity of a detecting apparatus which detects force, acceleration and magnetism. CONSTITUTION:Piezoelectric resistance elements Rx1-Rx4 are formed on the upper surface of a semiconductor substrate 100. Grooves C1 are formed below the inside resistance elements Rx2, Rx3, and grooves C2 are formed below the outside resistance elements Rx1, Rx4. Parts where the grooves C1 are formed become a first flexible part 121, and parts where the grooves C2 are formed become a second flexible part 122. A thick intermediate part 123 is formed between the two flexible parts. A fixing part 130 is rigidly bonded to the main body of the apparatus. When the force acts to an operating part 110, the flexible parts 121, 122 are distorted. The distortion is concentrated on the flexible parts 121, 122 because of the presence of the intermediate part 123, and therefore the mechanical deformation is focused on the resistance elements Rx1-Rx4. Accordingly, the resistance elements Rx1-Rx4 efficiently display the change of the electric resistance, and the force acting upon the operating part 110 can be detected with high sensitivity. |
