TRANSPORT SYSTEM OF AUTOMATIC CLEANING APPARATUS,申请号JP19910036828-传众专利搜索

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发明名称	TRANSPORT SYSTEM OF AUTOMATIC CLEANING APPARATUS
摘要
申请公布号	JPH04249320(A)	申请公布日期	1992.09.04
申请号	JP19910036828	申请日期	1991.02.05
申请人	MITSUBISHI ELECTRIC CORP	发明人	SADAMORI MASAAKI
分类号	H01L21/304;H01L21/677;H01L21/68	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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