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发明名称
PATTERNING MATERIAL
摘要
申请公布号
JPH04249509(A)
申请公布日期
1992.09.04
申请号
JP19900416315
申请日期
1990.12.29
申请人
KAWASAKI STEEL CORP
发明人
ENOMOTO NORIHIDE;YAMAMOTO SEIJI;NARUSE YOSHIHIRO
分类号
C08F212/04;C08F12/00;C08F22/10;C08F32/00;C08F220/04;C08F222/02;C08F222/04;C08F222/10;C08F232/08;H01L21/312
主分类号
C08F212/04
代理机构
代理人
主权项
地址
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