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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH04245622(A)
申请公布日期
1992.09.02
申请号
JP19910032005
申请日期
1991.01.31
申请人
FUJITSU LTD
发明人
YAMAGUCHI SHIGETO
分类号
H01L21/28;H01L21/3205;H01L21/768;H01L21/822;H01L21/8247;H01L27/04;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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