| 摘要 |
<p>In a coaxial impact collision ion scattering spectrometer (CAICISS), a Wien filter composed of a pair of electrodes 13 and a magnet 20 is placed in the flying path of the ions. The Wien filter acts as (a) a chopper for intermittently chopping ion beam irradiated onto the sample 17, and as (b) a filter that directs only ions having predetermined mass and electrical charges toward an aperture 16 and deviates other ions or non-ionized atoms from the aperture 16. Thus non-ionized atoms or impurity ions having different mass or electric charge are prevented from irradiating the sample 17. In another CAICISS, the axis A of the ion source 11 is set oblique to the axis B of the ion beam irradiated onto the sample 14, and only ions having predetermined mass and electrical charges are deflected from the axis A to the axis B by a pair of deflecting electrodes 13. <IMAGE></p> |
