METROLOGY SYSTEM FOR ANALYZING PANEL MISREGISTRATION IN A PANEL MANUFACTURING PROCESS AND PROVIDING APPROPRIATE INFORMATION FOR ADJUSTING PANEL MANUFACTURING PROCESSES
摘要
<p>A metrology system to analyse panel misregistration in a panel manufacturing process includes a software controlled system which checks defined panel parameters on the four corners of a panel and related artwork for processing with a master pettern etched on a glass reference with a machine vision measuring system. The panel or artwork being checked is positioned by panel center registration means to align the center of the panel with the center of the master pattern. Displacement and rotational differences are entered under software control into a data base and analyzed by a stored program intelligent analyses system into a plurality of parameters based on a parameter model which permits an analysis of the cause of the misregistration. <IMAGE></p>
申请公布号
EP0473363(A3)
申请公布日期
1992.09.02
申请号
EP19910307732
申请日期
1991.08.22
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
AMMANN, HANS HUGO;CHENG, KWOKMING JAMES;KOVACS, RICHARD F.;MICKS, HENRY BALDWIN, JR.;POTECHIN, JAMEY;SIMONS, EVERETT;STEINES, RICHARD CHARLES;TETZ, JOHN G.