发明名称 |
APPARATUS FOR GROWING CRYSTALS OF SEMICONDUCTOR MATERIALS |
摘要 |
<p>An apparatus for growing a semiconductor crystal from a melt includes a susceptor (12), a quartz crucible (14), at least one reinforcing ring (24), and a heater (20). The crucible (14) is housed in the suscector (12) for receiving a semiconductor material therein. The reinforcing ring (14) is provided on the quartz crucible (14) for enhancing the strength of the crucible (14). The heater (20) is disposed so as to surround the suspector (12) for heating the semiconductor material contained in the crucible (14).</p> |
申请公布号 |
EP0294758(B1) |
申请公布日期 |
1992.09.02 |
申请号 |
EP19880109048 |
申请日期 |
1988.06.07 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
KIDA, MICHIO;SAHIRA, KENSHO |
分类号 |
C30B15/10;C30B15/12 |
主分类号 |
C30B15/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|