发明名称 |
CRITICAL ORIFICE DILUTION APPARATUS AND METHOD |
摘要 |
An apparatus and method are provided for preparing low concentration gas phase calibration standards. The flows of a standard mixture of impurity in a gas and a dilution gas are controlled by regulating the pressure upstream of respective calibrated orifices. The pressures of the gas flows are regulated such that a critical flow condition is maintained through the orifices. The two flows are then combined to obtain a known dilution of the impurity in the gas.
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申请公布号 |
CA2062059(A1) |
申请公布日期 |
1992.09.02 |
申请号 |
CA19922062059 |
申请日期 |
1992.02.28 |
申请人 |
AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE (L') |
发明人 |
MCANDREW, JAMES J. F.;BRANT, MICHAEL D. |
分类号 |
G01N1/22;G01N1/00;G01N27/62;G01N33/00;G05D11/03;(IPC1-7):G05D11/02 |
主分类号 |
G01N1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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