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发明名称
FORMATION OF FILM
摘要
申请公布号
JPH04245458(A)
申请公布日期
1992.09.02
申请号
JP19910054149
申请日期
1991.01.30
申请人
NEC CORP
发明人
SEKI YUKO
分类号
H01L21/285;H01L21/28;H01L21/316;H01L21/3205;H01L21/768
主分类号
H01L21/285
代理机构
代理人
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