| 摘要 |
<p>PURPOSE:To equip a two-terminal element to operate for a long time stably by forming an insulation layer for restricting the active part of the element so as to be adjoining to insulation layer in order to restrict the active part. CONSTITUTION:As a thin film for lower electrode, an electroconductive film of Al, Ta, etc., is formed on a transparent base board 1 made of glass, plastic, etc., followed by patterning to form a lower electrode 2. As an insulation layer 3, Si, Nx film, or hard carbonic film is formed, followed by patterning. Another insulation layer 5 is formed by a method similar to that for the first named insulation layer 3, followed by patterning process which should generate patterns restricting the active part of an MIM(Metal Insulator Metal) element. As an upper electrode 4, further, an electroconductive thin film of Pt, Ni., etc., is formed, followed by patterning process.</p> |
