| 摘要 |
PURPOSE:To enable the number of parts to be reduced and time required for adjustment and required training to be reduced by using a light-receiving element for detecting a reflection light from a sample to be machined commonly with a TV camera is observation optical system. CONSTITUTION:A detection light emitted from a light-emitting element 29 of a height-detecting device 28 is set in parallel with a light axis of an observation optical system 27. The detection light strikes a sample 32 through a 1/4 wavelength plate 31, a half mirror 25, a dichroic mirror 21, and an objective lens for machining 22 and the reflection light travels in the reverse path, passes through a polarization plate 30, and then enters a TV camera 24 of the observation optical system 27. The position and movement of the reflection light from the sample 32 entering the TV camera 24 are processed by an image processing device 33, thus enabling a height of the sample to be machined 32 to be detected. |
