发明名称 |
Apparatus for positioning sample |
摘要 |
An apparatus for positioning a sample comprises a fine adjustment stage and a coarse adjustment stage. The fine adjustment stage is held by three Z axis fine adjustment driving structures above the first base. The fine adjustment stage has a number of through holes. The fine adjustment stage is provided X and Y axes fine adjustment driving structures other than the Z axis fine adjustment driving structures. The coarse adjustment stage comprises the second base which is provided above the first base and a number of protrusions which are provided dispersively on the second base. The coarse adjustment stage is connected to X and Y axes coarse adjustment driving structures through flexible and elastic members. The sectional areas of the protrusions are selected to a size which is movable freely within the through holes, respectively. By adjusting the Z axis fine adjustment driving structures, a sample hold base is held either the coarse adjustment stage or the fine adjustment stage.
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申请公布号 |
US5142791(A) |
申请公布日期 |
1992.09.01 |
申请号 |
US19910709317 |
申请日期 |
1991.06.03 |
申请人 |
HITACHI, LTD. |
发明人 |
KOBAYASHI, TOSHINORI;TSUNODA, MASAHIRO;FURUKAWA, TAKAYASU;KOBAYASHI, ISAO |
分类号 |
B23Q1/34;B23Q1/36;B23Q1/62;B23Q5/40;B23Q5/50;G03F7/20 |
主分类号 |
B23Q1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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