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经营范围
发明名称
METHOD OF MANUFACTURING CHEMICALLY ADSORBED FILM
摘要
申请公布号
US5143750(A)
申请公布日期
1992.09.01
申请号
US19910810114
申请日期
1991.12.19
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
YAMAGATA, YOSHIKAZU;MINO, NORIHISA;OGAWA, KAZUFUMI;SOGA, MAMORU
分类号
B05D1/18;C03C17/30;C04B41/45;C04B41/49;C04B41/81;C04B41/84;C09D4/00;H01L21/312
主分类号
B05D1/18
代理机构
代理人
主权项
地址
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