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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING CONTACT HOLE
摘要
申请公布号
KR920007446(B1)
申请公布日期
1992.09.01
申请号
KR19880014451
申请日期
1988.11.03
申请人
FUJITSU LTD.
发明人
EMA, DAIJI
分类号
H01L23/522;H01L21/762;H01L21/768;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/28
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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