| 摘要 |
To increase vacuum speed and quality, an additional cryopump is installed to the beam line of vacuum equipment. The operation of the additionally added pump is sensed and controlled by a sensor whose output is connected to the Relay, RL2, and by the vent switch, SW4, which automatically shuts off the vent solenoid valve when the cryopump operates. The vacuum and temperature of the cryopump is detected and connected to the display and the comparators, U1 and U2. The switch SW3, the Relay RL1, and the switch SW2 are designed to automatically control the lapping and high vacuum solenoid valve. The comparators, U1 and U2 are connected to RL 1 via Diode D1 and D3. The vacuum display and temperature display are connected to meter via SW5.
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