MOLECULAR BEAM EPITAXY APPARATUS CONTAINING DUAL MOLECULAR BEAM CELL AND FORMING METHOD OF DUAL-EPITAXIAL LAYER

摘要

The MBE apparatus for forming epitaxial layers on both sides simultaneously comprises a substrate (1) for growing the epitaxial layers, a substrate holder (2) for holding the substrate (1), a first molecular beam cell (3) for projecting materials in a form of molecular beams on one side of the substrate, a first shutter (5) for controlling the intermittence of the projected molecular beams, a second molecular beam cell (4) symmetric installed with centering around the substrate (1) to project the molecular beams on another side of the substrate, and a second shutter for controlling the intermittence of the beams projected from the cell (4).