CARBON ELECTRODE FOR PLASMA ETCHING,申请号JP19900416616-传众专利搜索

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发明名称	CARBON ELECTRODE FOR PLASMA ETCHING
摘要
申请公布号	JPH04242923(A)	申请公布日期	1992.08.31
申请号	JP19900416616	申请日期	1990.12.29
申请人	KAWASAKI REFRACT CO LTD	发明人	OSHIMA HIROAKI;TANAKA SEIJIRO;OGUCHI MASAO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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